Wafer-scale solid-state nanopores fabricated using extreme ultraviolet lithography

At this year’s IEEE International Electron Devices Meeting (IEDM 2025), IMEC, a research and innovation hub in advanced semiconductor technologies, is showcasing the first successful wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography. Solid-state nanopores appear to be powerful tools for molecular sensing, but have not yet been commercialized. This proof of concept constitutes a crucial step towards their profitable (mass) production.